self-aligned photoresist process

self-aligned photoresist process
susitapatinančioji fotolitografija statusas T sritis radioelektronika atitikmenys: angl. self-aligned photoresist process vok. selbstjustierende Fotolithografie, f rus. самосовмещённая фотолитография, f pranc. photolithographie à auto-alignement, f

Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“. . 2000.

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